Mini Buffer Loadport Rack 2 storage
| Class | Class 1,000 Depend on requirement |
| Cycle Time | < Avg. 30 sec / Swap |
| Control | PC Base |
| Stopping Accuracy | + / - 1mm |
| AGV Port (H1415mm) | Available |
| RFID Requirement | Support EQ / AGV / RGV |
| Monitor | > 17” panel |
| Safety | Follow to SEMI S2 |
| Compressed Air | 0.6Mpa、300nl/min |
| Interlock | Semi Standard or equivalent |
Mini Buffer Loadport Rack 4 storage
| Item | Specifications |
| Class | Class 1,000 Depend on requirement |
| Cycle Time | < Avg. 30 sec / Swap |
| Control | PC Base |
| Stopping Accuracy | + / - 1mm |
| AGV Port (H1415mm) | Available |
| RFID Requirement | Support OHT / EQ / AGV / RGV |
| Monitor | > 17” panel |
| Safety | Follow to SEMI S2 |
| Compressed Air | 0.6Mpa、300nl/min |
NTB-open cassette
| Item | Specifications |
| Class | Class 1 Depend on requirement |
| Control | PC Base |
| Stopping Accuracy | + / - 1mm |
| AGV Port | 900mm |
| RFID Requirement | Support OHT / EQ / AGV / RGV |
| Monitor | > 17” panel |
| Safety | Follow to SEMI S2 |
| Interlock | Semi Standard or equivalent |
| PIO/E84 | GCI/Hokuyo/Cantops |